Evaluation of Sputtered Mo–Cu–Cr–N Coatings Prepared at Different N2 Gas Flow Rates Using a Multicomponent Single-Alloy Target

With the growth of automobile, machinery, and aerospace industries, demand for high-performance surface coatings having multifunctional characteristics use in mechanical parts is increasing. In this study, ternary/quaternary Mo–Cu–Cr–(N) nanocomposite were deposited at different N2 gas flow rates using direct current magnetron sputtering from a multicomponent single-alloy target. The target simplifies deposition process improves coating uniformity. influence nitrogen content was investigated regarding microstructural, mechanical, tribological properties, corrosion resistance these coatings. Mo–Cu–Cr–N containing 30.5 at. % showed structure comprising transition metal nitride phases (Mo–N/Cr–N) high properties resistance, while retaining excellent ternary Mo–Cu–N